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300820

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RHH Series RF Power Supply

RHH series RF power supply relies on mature RF generation technology to provide customers with RF power supply with greater power, higher precision and fast response. With phase can be set, pulse controllable, digital tuning and other functions. Applicable fields: photovoltaic industry, flat panel display industry, semiconductor industry, chemical industry, laboratory, scientific research, manufacturing, etc.
Applicable processes: plasma enhanced chemical vapor deposition (PECVD), plasma etching, plasma cleaning, radio frequency ion source, plasma diffusion, plasma polymerization sputtering, reactive sputtering, etc.
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RHH Series
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Product description
Parameters
型号定义
主要参数

● Half-brick and rack mount styles

● Adopt full digital control, with convenient and rich operation menu

● Frequency tuning, pulse and pulse synchronization functions

● With CEX phase synchronization function

● Perfect protection function

Keyword:
function
pulse
synchronization
digital
phase
rack
tuning
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Input

Input voltage: AC220V±10% 3ΦAC380V±5%(Special specifications can be customized)

Input frequency: 47~63Hz

Output

Output frequency:  13.56MHz、27.12MHz、40.68MHz

Tuning range: ±5%

Output power: 1.5~5kW

Regulation range of output power: 1~100%

Output impedance: 50Ω+j0

Output interface: type N

Output mode: continuous, pulse

Pulse frequency: 100Hz~100kHz

Duty cycle:  5~95%

Performance index

Power factor: 0.98

Frequency stability accuracy: ±0.005%

Efficiency: 75% (at rated output)

Harmonic: <-45dBc

Stray: <-50dBc

External control interface: analog quantity, communication and synchronization

Communication mode: Standard RS485 communication interface; Optional Ether CAT, industrial Ethernet, etc.

Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.

四川英杰电气股份有限公司

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成都逸豪电梯有限公司

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Hotline:+86 0838-2900585  2900586
After-sales line:+86 0838-2900488  2900938

Fax:+86 0838-2900985

Switchboard:+86 0838-6930000
E-mail:injet@injet.cn

Address: No. 686, Jinshajiang West Road, Deyang, Sichuan, China.

Copyright © 2021 Sichuan Yingjie Electric Co., Ltd.