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300820

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MSD Series Sputtering Power Supply
产品特点 主要参数 型号定义 资料下载
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MSD Series Sputtering Power Supply

MSD series DC sputtering power supply adopts the company's core DC control system combined with excellent arc processing scheme, so that the product has very stable performance, high product reliability, small arc damage and good process repeatability. Adopt Chinese and English display interface, easy to operate.
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MSD Series
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Sputtering Power Supply
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Product description
Parameters
型号定义
主要参数

● Rack installation

● Fast arc response, response time <100ns

● Bottom energy storage, <1mJ/kW

● Compact installation structure, 3U standard chassis

● Chinese/English display interface, easy to operate

● Precise control

● Wide range of output

● Perfect protection function

Keyword:
installation
response
standard
compact
perfect
protection
storage
interface
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Input

Input voltage: 3AC380V±10%

Power: 20kW、30 kW

Input power frequency: 50Hz/60Hz

Output

Max. output voltage: 800V

Max. output current: 50A、75A

Output current ripple: ≤3% rms

Output Voltage Ripple: ≤2% rms

Technical index

Ignition voltage: 1000V / 1200V optional

Conversion efficiency: 95%

Arc off time: ＜100ns

Communication interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet and EtherCAT are optional)

Dimension(H*W*D)mm: 132*482*560: 176*482*700

Cooling mode: air cooling

Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.
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四川英杰电气股份有限公司

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成都逸豪电梯有限公司

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