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300820

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RMA Series Matchers
产品特点 主要参数 型号定义 资料下载
RF
RF generator, automatic matcher
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RF power
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2021-12-28 13:35:00
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RMA Series Matchers

It can be adapted to RLS series RF power supply, and is widely used in plasma etching, coating, plasma cleaning, plasma degumming and other processes. When used alone, it can be used together with other manufacturers' RF power supplies.
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产品系列:
RMA Series
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Category
RF Power
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Product description
Parameters
型号定义
主要参数

● Full digital control, high matching accuracy and short matching time

● Adopt vacuum capacitor, high reliability and long service life

● Compact structure, small size, easy installation

● Ultra-wide matching range, can be customized to fit any load

● With manual/automatic matching function

● With hold and preset function

● With communication function, it can be independently connected to the host computer to display the load status in real time

● Customizable output interface

Keyword:
matching
function
load
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Technical index

Control voltage: AC220V±10%

Transmission power: 0.5~5kW

Frequency: 2MHz、13.56MHz、27.12MHz、40.68MHz

Matching time: end to end ＜ 5S, preset point to matching point ＜ 0.5 ~ 3S

Standing wave: ＜1.2

Impedance real part: 5~200Ω

Impedance imaginary part: +200~-200j

RF output voltage: 4000Vpeak

RF output current: 25~40Arms

Input interface: type N

Output interface: copper bar or L29

Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.
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